Abstract
A semi-flexible SU-8 polymer microdevice was designed to deflect in response to a change in surface tension at an air-water interface. The suspended microtensiometer encloses a clean water-air interface, while externally the device is surrounded by an interface containing an insoluble component. The difference in surface tension between the inside and outside of the device, called the surface pressure, causes the device to deflect. Finite element simulations were performed to predict device behavior prior to fabrication. Finished devices were tested in a Langmuir trough during multiple compression and expansion cycles, using a platinum Wilhelmy plate for an independent surface pressure measurement. A resolution of 0.16 mN/m was achieved.
| Original language | English |
|---|---|
| Title of host publication | Procedia Engineering |
| Editors | Giorgio Sberveglieri, Vittorio Ferrari |
| Place of Publication | gbr |
| Publisher | Elsevier Ltd |
| Pages | 80-83 |
| Number of pages | 4 |
| Volume | 87 |
| DOIs | |
| State | Published - Jan 1 2014 |
| Event | 28th European Conference on Solid-State Transducers, EUROSENSORS 2014 - Brescia, Italy Duration: Sep 7 2014 → Sep 10 2014 |
Conference
| Conference | 28th European Conference on Solid-State Transducers, EUROSENSORS 2014 |
|---|---|
| Country/Territory | Italy |
| City | Brescia |
| Period | 09/7/14 → 09/10/14 |
Keywords
- Interfacial rheology
- MEMS
- SU-8
- Surface pressure
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