Abstract
A form of active disturbance rejection control (ADRC) is proposed for a kind of discrete systems in this paper. The state space form of the system is firstly formulated. Then the extended state observers (ESO) with and without model information are presented to estimate states and total disturbance. The control law is formulated to reject disturbance and to track a given trajectory. As a case study, the semiconductor manufacturing process is used to validate the proposed solution. Comparing with the exponentially weighted moving average controller, simulations indicate that the proposed discrete ADRC is effective in cancelling disturbance and in tracking the desired target.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of 2020 IEEE 9th Data Driven Control and Learning Systems Conference, DDCLS 2020 |
| Editors | Mingxuan Sun, Huaguang Zhang |
| Place of Publication | usa |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 378-382 |
| Number of pages | 5 |
| ISBN (Electronic) | 9781728159225 |
| DOIs | |
| State | Published - Nov 20 2020 |
| Event | 9th IEEE Data Driven Control and Learning Systems Conference, DDCLS 2020 - Liuzhou, China Duration: Nov 20 2020 → Nov 22 2020 |
Conference
| Conference | 9th IEEE Data Driven Control and Learning Systems Conference, DDCLS 2020 |
|---|---|
| Country/Territory | China |
| City | Liuzhou |
| Period | 11/20/20 → 11/22/20 |
Keywords
- Active Disturbance Rejection Control
- Discrete System
- Exponentially Weighted Moving Average
- Semiconductor Manufacturing Process
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