Characterization of nonlinearities in a piezoelectric positioning device

Hanz Richter; Eduardo A. Misawa; D. A. Lucca

Characterization of nonlinearities in a piezoelectric positioning device

Hanz Richter
, Eduardo A. Misawa
, D. A. Lucca

Mechanical Engineering

Oklahoma State University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

9 Scopus citations

Abstract

Static nonlinearity, drift and hysteresis are effects that limit the open-loop operation of piezoelectric (PZT) tubes as positioning devices. In this paper, several experiments are presented that characterize and quantify these effects. Experiments are carried out on the Nanocut, a nanometric cutting instrument, which utilizes a PZT tube as a three-dimensional actuator. PI control is used in the z axis in order to increase accuracy and linearity, with acceptable results for low-bandwidth operation. The system is tested in a nano-indentation experiment, resulting in adequate tracking accuracy.

Original language	English
Title of host publication	IEEE Conference on Control Applications - Proceedings
Publisher	IEEEPiscataway, NJ, United States
Pages	717-720
Number of pages	4
State	Published - Dec 1 1997
Event	Proceedings of the 1997 IEEE International Conference on Control Applications - Hartford, CT, USA Duration: Oct 5 1997 → Oct 7 1997

Conference

Conference	Proceedings of the 1997 IEEE International Conference on Control Applications
City	Hartford, CT, USA
Period	10/5/97 → 10/7/97

Cite this

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title = "Characterization of nonlinearities in a piezoelectric positioning device",

abstract = "Static nonlinearity, drift and hysteresis are effects that limit the open-loop operation of piezoelectric (PZT) tubes as positioning devices. In this paper, several experiments are presented that characterize and quantify these effects. Experiments are carried out on the Nanocut, a nanometric cutting instrument, which utilizes a PZT tube as a three-dimensional actuator. PI control is used in the z axis in order to increase accuracy and linearity, with acceptable results for low-bandwidth operation. The system is tested in a nano-indentation experiment, resulting in adequate tracking accuracy.",

author = "Hanz Richter and Misawa, \{Eduardo A.\} and Lucca, \{D. A.\}",

year = "1997",

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day = "1",

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note = "Proceedings of the 1997 IEEE International Conference on Control Applications ; Conference date: 05-10-1997 Through 07-10-1997",

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T1 - Characterization of nonlinearities in a piezoelectric positioning device

AU - Richter, Hanz

AU - Misawa, Eduardo A.

AU - Lucca, D. A.

PY - 1997/12/1

Y1 - 1997/12/1

N2 - Static nonlinearity, drift and hysteresis are effects that limit the open-loop operation of piezoelectric (PZT) tubes as positioning devices. In this paper, several experiments are presented that characterize and quantify these effects. Experiments are carried out on the Nanocut, a nanometric cutting instrument, which utilizes a PZT tube as a three-dimensional actuator. PI control is used in the z axis in order to increase accuracy and linearity, with acceptable results for low-bandwidth operation. The system is tested in a nano-indentation experiment, resulting in adequate tracking accuracy.

AB - Static nonlinearity, drift and hysteresis are effects that limit the open-loop operation of piezoelectric (PZT) tubes as positioning devices. In this paper, several experiments are presented that characterize and quantify these effects. Experiments are carried out on the Nanocut, a nanometric cutting instrument, which utilizes a PZT tube as a three-dimensional actuator. PI control is used in the z axis in order to increase accuracy and linearity, with acceptable results for low-bandwidth operation. The system is tested in a nano-indentation experiment, resulting in adequate tracking accuracy.

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M3 - Conference contribution

SP - 717

EP - 720

BT - IEEE Conference on Control Applications - Proceedings

PB - IEEEPiscataway, NJ, United States

T2 - Proceedings of the 1997 IEEE International Conference on Control Applications

Y2 - 5 October 1997 through 7 October 1997

ER -

Characterization of nonlinearities in a piezoelectric positioning device

Abstract

Conference

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